Configuration |
6”Wafer ==> Test ==> Tape & Reel |
Dimension |
LxWxH:2150mm x 1110mm x 1850mm |
Applicable Packages |
1414~1818 Packages (55 ~ 70 mil) |
Wafer Table Input & Pickup Tolerances |
6 Inch DTF 2-6-1 Metal Frames |
θ: +/- 3° |
|
T&R Station Auto Adjustment |
+/-30um |
CCD Systems |
Wafer Table Pickup CCD (5MP) |
Bottom Side CCD (5MP) |
|
T&R Placement CCD (2MP) |
|
T&R Package Inspection (5MP) |
|
Run Speed |
≧15k/hr. |