Configuration

6”Wafer ==> Test ==> Tape & Reel

Dimension

LxWxH：2150mm x 1110mm x 1850mm

Applicable Packages

1414~1818 Packages (55 ~ 70 mil)

Wafer Table Input &    Pickup Tolerances

6 Inch DTF 2-6-1 Metal Frames

θ: +/- 3°

T&R Station Auto Adjustment

+/-30um

CCD Systems

Wafer Table Pickup CCD (5MP)

Bottom Side CCD (5MP)

T&R Placement CCD (2MP)

T&R Package Inspection (5MP)

Run Speed

≧15k/hr.